High purity, resistance to corrosive media, leak integrity and accuracy as well as the SEMATECH and SEMI Standards all make up the basic requirements for the development and production of our measuring instruments for the semi-conductor industry. Our product range offers sophisticated solutions for pressure measurement in gas, chemical and solvent supply systems. Through our innovative product design, characterised by low dead-space and excellent purge properties of the sensing surfaces benefits reduced start-up and maintenance times.
Gas delivery systems (gas sticks, gas panels, bulk-gas supply systems)
Ultra high purity water supply
Liquid chemical supply
Level measurement for liquefied gases and solvents
WIKA Products for the Semiconductor Industry
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