Semiconductor Industry

Production at the highest stage

High purity, resistance to corrosive media, leak integrity and accuracy as well as the SEMATECH and SEMI Standards all make up the basic requirements for the development and production of our measuring instruments for the semi-conductor industry. 

Our product range offers sophisticated solutions for pressure measurement in gas, chemical and solvent supply systems. Through our innovative product design, characterised by low dead-space and excellent purge properties of the sensing surfaces  benefits reduced start-up and maintenance times.

For explosion-protection zones, in order that measurements can be made in accordance with appropriate laws and guidelines, we offer instruments in ATEX and/or FM certified designs.

Approvals

Examples of Applications

  • Gas delivery systems (gas sticks, gas panels, bulk-gas supply systems) 

  • Ultra high purity water supply 

  • Liquid chemical supply

  • Level measurement for liquefied gases and solvents

  • etc.
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